Surface Property Control for 193nm Immersion Resist
نویسندگان
چکیده
منابع مشابه
High Refractive Index Immersion Fluids for 193nm Immersion Lithography
For the next-generation immersion lithography technology, there is a growing interest in the immersion fluids having a refractive index larger than 1.5 and low absorbance at 193nm wavelength. In this paper, we report our effort in identifying new immersion fluid candidates. The absolute refractive index values and thermo-optic coefficients, dn/dT, were measured with 1x10 and 1x10 accuracy respe...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2006
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.19.565